Micro and Nanofabrication (MEMS)

Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.

Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.

Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.

In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment.

What you'll learn

• How to select the correct fabrication process for a specific micro-device or microsystem
• Establish the workflow for the cleanroom processes
• Identify how physical and chemical phenomena govern miniaturized systems for various applications
• Resource planning for a given microsystem fabrication

Meet the instructors

• Juergen Brugger
• Martin Gijs

How to navigate through this course

Start the course by clicking on the below menu.

If you are new to edX and would like to learn how to navigate the edX platform, take this fun and interactive demo course designed to help you explore the edX learning experience. It is perfect to take before you start this present course.